Abstract
Tilt sensing is important for human body motion detection and measurement. Two tilt sensors are introduced in this paper, based on MEMS (Micro-electromechanical Systems) variable capacitors, and utilizing the gravitational effect on a suspended proof mass to detect inclinations. A symmetric comb structure with high aspect ratio is adopted to obtain high capacitance. The first device can achieve a full range (−90° to +90°) tilt angle detection and relax the high-resolution requirement of the readout system by its linear output characteristics. Based on the same concept, a novel inherently digital sensor is proposed. The digital signal can be read out without complex processing, and so low power consumption can be achieved. A fabrication process, and simulation and processing results, are presented.
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© 2007 International Federation for Medical and Biological Engineering
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Zhao, L., Yeatman, E.M. (2007). Micro Capacitive Tilt Sensor for Human Body Movement Detection. In: Leonhardt, S., Falck, T., Mähönen, P. (eds) 4th International Workshop on Wearable and Implantable Body Sensor Networks (BSN 2007). IFMBE Proceedings, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-70994-7_34
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DOI: https://doi.org/10.1007/978-3-540-70994-7_34
Publisher Name: Springer, Berlin, Heidelberg
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