Abstract
This paper deals with the design of the capacitor insertion method for the three degree-of-freedom (DOF) flexible and deformation mechanisms aimed to eliminate hysteresis effects in piezoelectric actuators. By inserting a capacitor in series with the piezoelectric actuator is applied a 3-DOF nano-precision platform and laser-measuring systems.The Z-tilts(z, pitch, and roll motion) error compensation stage of the nano-measuring machine is accomplished. In addition, a high resolution laser interferometer is used to measure position accurately. Therefore, above the method is effectively applied to a piezoelectric actuator are presented that compensate substantial improvements in positioning control precision and control performance. With the aid of positioning control, this system provides +/-60nm positioning resolution over the total range of 1000nm and +/-0.1 arcsec angle resolution over the total range of 3 arcsec for the stage along the z-direction.
This is a preview of subscription content, log in via an institution.
We’re sorry, something doesn't seem to be working properly.
Please try refreshing the page. If that doesn't work, please contact support so we can address the problem.
Preview
Unable to display preview. Download preview PDF.
References
Reinder, B., Koning, W.L.D., Adriaens, H.J.M.T.A., Richard, K.K.: State-Space Analysis and Identification for a Class of Hysteretic Systems. Automatica 37, 1883–1892 (2001)
Su, C.Y., Wang, Q., Chen, X., Rakheja, S.: Backstepping Based Variable Structure Control of a Class of Nonlinear Systems. Preceded By Hysteresis: Int. conf. Control and Automatic, Budapest, Hungary, pp. 288-292 (2005)
Ge, P., Jouaneh, M.: Tracking Control of a Piezoceramic Actuator. IEEE Trans. Control Syst. Technolgy 4(3), 209–216 (1996)
Goldfard, M., Celanovic, N.: A Lumped Parameter Electromechanical Model for Describing the Nonlinear Behavior of Piezoelectric Actuators. ASME J. Dyn. Syst., Meas. Control I(119), 478–485 (1997)
Tsai, S., Chen, J.S.: Robust Tracking Control of a Piezoactuator Using a New Approximate Hysteresis Model. ASME J. Dyn. Syst., Meas. Contol 125, 96–102 (2003)
Dupre, L., Keer, R.V., Melkebeek, J.A.A.: Identification of The Relation Between The Material Parameters In The Presach Model and In The Jiles-Atherton Hysteresis Model. J. Appl. Phys. 85, 4376–4378 (1999)
Adriaens, H.J.M.T.A., Koning, W.L.D., Banning, R.: Modeling Piezoelectric Actuators. IEEE/ASME Trans. Mechatronics 5(4), 331–341 (2000)
Yu, Y., Naganathan, N., Dukkipati, R.: Preisach Modeling of Hysteresis for Piezoceramic Actuators System. Mechanism & Machine Theory 37, 49–59 (2002)
Author information
Authors and Affiliations
Editor information
Rights and permissions
Copyright information
© 2007 Springer Berlin Heidelberg
About this paper
Cite this paper
Liu, VT., Liu, CH., Chen, TY., Lin, CL., Lin, YC. (2007). Tracking Control of the Z-Tilts Error Compensation Stage of the Nano-measuring Machine Using Capacitor Insertion Method. In: Huang, DS., Heutte, L., Loog, M. (eds) Advanced Intelligent Computing Theories and Applications. With Aspects of Theoretical and Methodological Issues. ICIC 2007. Lecture Notes in Computer Science, vol 4681. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74171-8_61
Download citation
DOI: https://doi.org/10.1007/978-3-540-74171-8_61
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-74170-1
Online ISBN: 978-3-540-74171-8
eBook Packages: Computer ScienceComputer Science (R0)