Abstract
Due to the difficulties of establishing a model of semiconductor manufacturing line, a real-time scheduling system of semiconductor manufact- uring line is established with discrete event simulation technique. By employing the object-oriented modeling method, this system is implemented by simulation. An actual system with 40 machines and 60 processing steps is employed to demonstrate the validity of this system. Experiments indicate that the modeling and real-time scheduling system is accurate and reliable.
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Wang, Z., Jiang, X., Wu, Q. (2007). Modeling and Real-Time Scheduling of Semiconductor Manufacturing Line Based on Simulation. In: Li, K., Fei, M., Irwin, G.W., Ma, S. (eds) Bio-Inspired Computational Intelligence and Applications. LSMS 2007. Lecture Notes in Computer Science, vol 4688. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-74769-7_62
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DOI: https://doi.org/10.1007/978-3-540-74769-7_62
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-74768-0
Online ISBN: 978-3-540-74769-7
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