Abstract
Macro-micro dual-drive positioning stage has particularly good potential application in high acceleration and high precision positioning stage using for IC packaging. In this paper, the positioning stage which is composed by VCM (voice coil motor) as macro driver and PZT as micro driver is used. Coupling characters of the stage are discussed by analyzing dynamic model firstly, then models of macro drive positioning stage and micro drive positioning stage are built separately which both contain mechanism and driver part. Finally, a control structure, micro drive positioning stage dynamic compensate the positioning error produced by macro drive positioning stage, is proposed, in this control structure, LQG control method is used to control macro drive positioning stage, and PID control method is used to control the micro drive positioning stage. Detailed designs are conducted for the proposed approach, and the simulation results demonstrate the good performance of the proposed controller.
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© 2008 Springer-Verlag Berlin Heidelberg
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Liu, Y., Li, T., Sun, L. (2008). Modeling and Control of Macro-micro Dual-Drive High Acceleration and High Precision Positioning Stage Using for IC Packaging. In: Xiong, C., Liu, H., Huang, Y., Xiong, Y. (eds) Intelligent Robotics and Applications. ICIRA 2008. Lecture Notes in Computer Science(), vol 5315. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-88518-4_30
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DOI: https://doi.org/10.1007/978-3-540-88518-4_30
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-88516-0
Online ISBN: 978-3-540-88518-4
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