Abstract
This paper presents the controller design of an XY parallel micropositioning stage aiming at a sub-micron accuracy for micro scale manipulation. Owning to the decoupled design of the mechanism, a simple single-input-single-output (SISO) PID controller is adopted for each axis. To compensate for the hysteresis arising from piezoelectric actuator, credit assigned CMAC (cerebellar model articulation controller) neural network with adjustable learning rate is employed into the PID control. Experimental results show that the hysteresis of the stage has been significantly reduced by the CMAC-based PID controller and the stage can achieve a sub-micron positioning accuracy, which demonstrate the effectiveness of the designed controller as well.
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Xu, Q., Li, Y. (2009). CMAC-Based PID Control of an XY Parallel Micropositioning Stage. In: Yu, W., He, H., Zhang, N. (eds) Advances in Neural Networks – ISNN 2009. ISNN 2009. Lecture Notes in Computer Science, vol 5552. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-01510-6_118
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DOI: https://doi.org/10.1007/978-3-642-01510-6_118
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-01509-0
Online ISBN: 978-3-642-01510-6
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