Abstract
The RCA cleaning method is the industry standard way to clean silicon wafers, where the temperature control is important for a stable cleaning performance. However, it is difficult mainly because the RCA solutions expose nonlinear and time-varying exothermic chemical reactions. So far, the MSPC (model switching predictive controller) using the CAN2 (competitive associative net 2) has been developed and the effectiveness has been validated. In this article, we focus on the problem of variable initial temperature which changes the plant dynamics. To solve this problem, we present a method to switch multiple CAN2s, each of which has been trained with the data for different initial temperature. The effectiveness of the present method is evaluated by means of computer simulation.
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© 2009 Springer-Verlag Berlin Heidelberg
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Kurogi, S., Yuno, H., Koshiyama, Y. (2009). A Method to Switch Multiple CAN2s for Variable Initial Temperature in Temperature Control of RCA Cleaning Solutions. In: Leung, C.S., Lee, M., Chan, J.H. (eds) Neural Information Processing. ICONIP 2009. Lecture Notes in Computer Science, vol 5864. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10684-2_7
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DOI: https://doi.org/10.1007/978-3-642-10684-2_7
Publisher Name: Springer, Berlin, Heidelberg
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