Abstract
Due to the high uncertainty of semiconductor manufacturing system, its rescheduling problems are extremely difficult to solve. In this paper, we investigate a novel single machine oriented match-up rescheduling (SMUR) method that implement the partial repair rescheduling in a dynamic manufacturing environment. Both of SMUR principle and algorithm are discussed. Its effectiveness has been verified by a simulation study. Computational results show that the proposed method has better stability and efficiency compared with the right-shift rescheduling method.
This work was supported in part by the National Natural Science Foundation of China (No. 61034004, 50905129), the Science and Technology Commission of Shanghai (No. 10DZ1120100, 09DZ1120600, 11ZR1440400), the Program for New Century Excellent Talents (No. NCET-07-0622), the major national S&T program (No. 2011ZX03005-004-01) and the Shanghai Leading Academic Discipline Project (No. B004).
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References
Ouelhadj, D., Petrovic, S.: A survey of dynamic scheduling in manufacturing systems. J. Sched. 12, 417–431 (2009)
Qiao, F., Li, L., Wu, Q.D.: Colored Petri net based hierarchical scheduling model for semiconductor production line. In: 5th World Congress on Intelligent Control and Automation, Spain, pp. 3014–3018 (2004)
Cheng, M., Sugi, M., Ota, J.: A fast rescheduling method in semiconductor manufacturing allowing for tardiness and scheduling stability. In: Proc. of the 2006 IEEE Int. Conf. on Automation Science and Engineering, Shanghai, China, pp. 100–105 (2006)
Liu, L., Gu, H.Y., Xi, Y.G.: Robust and stable scheduling of a single machine with random machine breakdowns. Int. J. Adv. Manuf. Technol. 31, 645–654 (2007)
Nasr, A.H., ElMekkawy, T.Y.: Robust and stable flexible job shop scheduling with random machine breakdowns using a hybrid genetic algorithm. Int. J. Production Economics 132, 279–291 (2011)
Dominic, P.D.D., Kaliyamoorthy, S., Kumar, M.S.: Efficient dispatching rules for dynamic job shop scheduling. Int. J. Adv. Manuf. Technol. 24, 70–75 (2004)
Qiao, F., Wu, Q.D., Li, L., Wang, Z.T., Shi, B.: A fuzzy Petri net-based reasoning method for rescheduling. Transactions of the Institute of Measurement and Control 33(3-4), 435–455 (2011)
Vieira, G.E., Herrmann, J.W., Lin, E.: Rescheduling manufacturing systems: a framework of strategies, policies, and methods. J. of Sched. 6, 39–62 (2003)
Mustapha, M.F.B., Deris, S.B.: Rescheduling for manufacturing based on ontology and problem solving method. In: 8th International Conference on Intelligent Systems Design and Applications, ISDA 2008, Taiwan, vol. 2, pp. 444–449 (2008)
Abumaizar, R.J., Svestka, J.A.: Rescheduling job shops under disruptions. Int. J. Prod. Res. 35, 2065–2082 (1997)
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Qiao, F., Li, L., Ma, Y., Shi, B. (2012). Single Machine Oriented Match-Up Rescheduling Method for Semiconductor Manufacturing System. In: Su, CY., Rakheja, S., Liu, H. (eds) Intelligent Robotics and Applications. ICIRA 2012. Lecture Notes in Computer Science(), vol 7507. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-33515-0_22
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DOI: https://doi.org/10.1007/978-3-642-33515-0_22
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