Abstract
Traditional design flow is not efficient enough for the complex surface micromachined device because of its lack of perceptual intuition. The feature technology was introduced into micro device area to provide the comfortable design environment. The problem solving of generating mask from the 3D model of micro device plays the key role to implement the advanced design way, which emphasized on the structural design method instead of beginning with the issues of fabricating processes. In this paper, the algorithm to evaluate the data of mask based on the 3D model of surface micromachined device is presented. With respect to the etching process, the etched solids were built up by particular operations of the layer models to indicate the etched parts. After that, the mask is derived on the basis of the etched solids.
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Liu, Z. (2013). Generating Mask from the Structural Layer of Micro Device. In: Tan, Y., Shi, Y., Mo, H. (eds) Advances in Swarm Intelligence. ICSI 2013. Lecture Notes in Computer Science, vol 7929. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-38715-9_60
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DOI: https://doi.org/10.1007/978-3-642-38715-9_60
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-38714-2
Online ISBN: 978-3-642-38715-9
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