Abstract
In this paper we review our ongoing research on untethered stress-engineered microrobots (MicroStressBots), focusing on the challenges and opportunities of operating mobile robots on the micrometer size scale. The MicroStressBots are fabricated with planar dimensions of approximately 260 μm × 60 μm and a total mass less than 50 ng from 1.5-3.5 μm thick polycrystalline silicon using a surface micromachining processes. A single global power delivery and control signal is broadcast to all our robots, but decoded differently by each species using onboard electromechanical memory and logic. We review our design objectives in creating robots on the microscale, and describe the constraints imposed by fabrication, assembly, and operation of such small robotic systems. Our robots have been used to motivate and demonstrate multiple robot control algorithms constrained by a single global signal with a limited number of distinct voltages.
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References
Donald, B.R., Levey, C.G., McGray, C., Rus, D., Sinclair, M.: Power delivery and locomotion of untethered micro-actuators. Journal of Microelectromechanical Systems 10(6), 947–959 (2003)
Donald, B.R., Levey, C.G., McGray, C., Paprotny, I., Rus, D.: An untethered, electrostatic, globally-controllable MEMS micro-robot. Journal of Microelectromechanical Systems 15(1), 1–15 (2006)
Donald, B.R., Levey, C.G., Paprotny, I.: Planar microassembly by parallel actuation of MEMS microrobots. Journal of Microelectromechanical Systems 17(4), 789–808 (2008)
Paprotny, I., Levey, C., Wright, P., Donald, B.: Turning-rate selective control: A new method for independent control of stress-engineered MEMS microrobots. In: Robotics: Science and Systems VIII (2012)
Donald, B.R., Levey, C., Paprotny, I., Rus, D.: Planning and control for microassembly using stress-engineered. International Journal of Robotics Research 32(2), 218–246 (2013)
Akiyama, T., Shono, K.: Controlled stepwise motion in polysilicon microstructures. Journal of Microelectromechanical Systems 2(3), 106–110 (1993)
Tsai, C.L., Henning, A.K.: Out-of-plane microstructures using stress engineering of thin films. In: Proceedings of the Microlithography and Metrology in Micromachining, vol. 2639, pp. 124–132 (1995)
Donald, B.R.: Building very small mobile micro robots. Inaugural Lecture, Nanotechnology Public Lecture Series. MIT (Research Laboratory for Electronics, Electrical Engineering and Computer Science, and Microsystems Technology, Laboratories), Cambridge (2007), http://mitworld.mit.edu/video/463/
Becker, A.T.: Ensemble Control of Robotic Systems. PhD thesis, University of Illinois at Urbana-Champaign (2012)
Diller, E., Floyd, S., Pawashe, C., Sitti, M.: Control of multiple heterogeneous magnetic micro-robots in two dimensions. IEEE Transactions on Robotics 28(1), 172–182 (2012)
Mason, M.T.: Mechanics of Robotic Manipulation. MIT Press (2001)
McGray, C.D., Stavis, S.M., Giltinan, J., Eastman, E., Firebaugh, S., Piepmeier, J., Geist, J., Gaitan, M.: Mems kinematics by super-resolution fluorescence microscopy. Journal of Microelectromechanical Systems 22(1), 115–123 (2013)
Trimmer, W.S.N.: Microrobots and micromechanical systems. Sensors and Actuators 19(3), 267–287 (1998)
Gosh, A.: Scaling Laws. In: Chakraborty, S. (ed.) Mechanics Over Micro and Nano Scales, ch. 2. Springer, New York (2011)
Bhushan, B., Dandavate, C.: Thin-film friction and adhesion studies using atomic force microscopy. Journal of Applied Physics 87(3), 1201–1210 (2000)
Williams, J.A., Lee, H.: Tribology and MEMS. Journal of Physics D: Applied Physics 39, R201–R214 (2006)
Bora, C.K., Flater, E.E., Street, M.D., Redmond, J.M., Starr, M.J., Carpick, R.W., Plesha, M.E.: Multiscale roughness and modeling of MEMS interfaces. Tribology Letters 19(1), 37–48 (2005)
Yesin, K.B., Vollmers, K., Nelson, B.J.: Modeling and control of untethered boimicrorobots in fluid environment using electromagnetic fields. The International Journal of Robotics Research 25(5-6), 527–536 (2006)
Pawashe, C., Floyd, S., Sitti, M.: Modeling and experimental characterization of an untethered magnetic micro-robot. International Journal of Robotics Research 28(9), 1077–1094 (2009)
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Levey, C.G., Paprotny, I., Donald, B.R. (2014). MicroStressBots: Species Differentiation in Surface Micromachined Microrobots. In: Paprotny, I., Bergbreiter, S. (eds) Small-Scale Robotics. From Nano-to-Millimeter-Sized Robotic Systems and Applications. ICRA 2013. Lecture Notes in Computer Science(), vol 8336. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-55134-5_6
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DOI: https://doi.org/10.1007/978-3-642-55134-5_6
Publisher Name: Springer, Berlin, Heidelberg
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