Skip to main content
SpringerLink
Log in

A Parallel Tester Architecture for Accelerometer and Gyroscope MEMS Calibration and Test

  • Published:
Journal of Electronic Testing Aims and scope Submit manuscript

Abstract

This paper describes a tester architecture for Accelerometer and Gyroscope Micro-ElectroMechanical System (MEMS) devices test and calibration, allowing increased parallelism rate and process accuracy. The proposed tester architecture tackles some critical issues related to MEMS testing, such as mitigating mechanical concerns that potentially impact on the equipment Mean Time Between Maintenance and guaranteeing a sufficient number of measurements in the time unit. The proposed strategy consists in an innovative and low cost tester resource partitioning that overcomes current limitations to multisite Accelerometer and Gyroscope MEMS testing. A tester prototype was implemented exploiting FPGAs; feasibility and effectiveness of the proposed methodology was demonstrated on commercial accelerometer and gyroscope MEMS devices.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14
Fig. 15

Similar content being viewed by others

References

  1. Allen HV, Terry SC, de Bruin DW (1989) Self-testable accelerometer systems. IEEE Micro Electro Mechanical Systems proc 113–115. doi:10.1109/MEMSYS.1989.77973

  2. Bernardi P, Sonza Reorda M (2008) A novel methodology for reducing SoC test data volume on FPGA-based testers. DATE proc 2008:194–199. doi:10.1109/DATE.2008.4484685

    Article  Google Scholar 

  3. Charlot B, Mir S, Parrain F, Courtois B (2001) Electrically induced stimuli for MEMS self-test. VTS Proc 2001:210–215

    Google Scholar 

  4. Chatfield AB (1997) Fundamentals of high accuracy inertial navigation. AIAA, Progress in Astronautics and Aeronautics Series, 174

  5. Cheng H, Zhao Y, Qiang B, Liu Y (2009) Design of testing system for accelerometer based on GP-IB. ICEMI 2009:2–548–2–551.

  6. Ciganda L, Abate F, Bernardi P, Bruno M, Sonza Reorda M (2009) An enhanced FPGA-based low-cost tester platform exploiting effective test data compression for SoCs. DDECS 258–263

  7. Cortese MF, Avenia G (2010) MEMS testing: innovations in mass production. Electronic Products. http://www2.electronicproducts.com/MEMS_testing_innovations_in_mass_production-article-farc_stmicro_jul2010-html.aspx. Posted 28 July 2010

  8. Deb N, Blanton RD (2002) Built-in self test of CMOS-MEMS accelerometers. ITC proc 1075–1084. doi:10.1109/TEST.2002.1041864

  9. Dhayni A, Mir S, Rufer L, Bounceur A (2006) Pseudorandom functional BIST for linear and nonlinear MEMS. DATE proc 1–6. doi:10.1109/DATE.2006.244039

  10. Dumas N, Azaïs F, Mailly F, Nouet P (2010) Study of an electrical setup for capacitive MEMS accelerometers test and calibration. J Electron Test 26:111–125. doi:10.1007/s10836-009-5122-6

    Article  Google Scholar 

  11. Farahani H, Mills JK, Cleghorn WL (2009) Design, fabrication and analysis of micromachined high sensitivity and 0% cross-axis sensitivity capacitive accelerometers. Microsyst Technol 15:1815–1826. doi:10.1007/s00542-009-0895-1

    Article  Google Scholar 

  12. Gyro and Accelerometer Panel of the IEEE Aerospace and Electronic Systems Society (2005) IEEE Standard Specification Format Guide and Test Procedure for Single-Degree-of-Freedom Rate-Integrating Gyros. IEEE Std 517™-1974(R2005), United States of America

  13. Gyro and Accelerometer Panel of the IEEE Aerospace and Electronic Systems Society (2008) IEEE standard specification format guide and test procedure for linear single-axis, Nongyroscopic Accelerometers. IEEE Std 1293™-1998 (R2008), United States of America

  14. Haipeng L, Shiqiao G, Xinjian L, Lei J (2009) Performance analysis and measurement of micro-machined gyroscope. ICEMI 2009:1–30–1–34.

  15. Ramadoss R, Dean R, Xiong X (2008) MEMS testing. In: Wang LT, Stroud CE, Touba NA (eds) System-on-chip test architectures: nanometer design for testability, 1st edn. Elsevier Inc, Burlington, pp 591–646

    Chapter  Google Scholar 

  16. Robin L (2009) MEMS Accelerometer, Gyroscope and IMU market 2008–2013. Yole Déeveloppment rep 2009

  17. Shkel AM, Acar C, Painter C (2005) Two types of micromachined vibratory gyroscopes. IEEE Sensors 531–536. doi:10.1109/ICSENS.2005.1597753

  18. Skvortzov V, Yong Chul Cho, Byeung-Leu1 Lee, Cimoo Song (2004) Development of a Gyro Test System at Samsung Advanced Institute of Technology. PLANS 133–142

  19. Xiong X, Wu YL, Jone WB (2005) A dual-mode built-in self-test technique for capacitive MEMS Devices. IEEE Transactions on Instrumentation and Measurement 54(5):1739–1750

    Article  Google Scholar 

  20. Zhiyuan L, Jianqing Z (2009) A dynamic balance testing framework for gyroscope based on embedded system. AICI 3:573–577

    Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Dipartimento di Automatica e Informatica, Politecnico di Torino, Turin, Italy

    Lyl M. Ciganda Brasca, Paolo Bernardi & Matteo Sonza Reorda

  2. SPEA Test Equipment, Volpiano, Italy

    Dimitri Barbieri, Luciano Bonaria, Roberto Losco, Luciano Marcigot & Maurizio Straiotto

Authors
  1. Lyl M. Ciganda Brasca
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Paolo Bernardi
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Matteo Sonza Reorda
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Dimitri Barbieri
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Luciano Bonaria
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Roberto Losco
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Luciano Marcigot
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Maurizio Straiotto
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Paolo Bernardi.

Additional information

Responsible Editor: H. Stratigopoulos

This work is part of a framework granted by Piedmont Region Government.

Rights and permissions

Reprints and permissions

About this article

Cite this article

Ciganda Brasca, L.M., Bernardi, P., Sonza Reorda, M. et al. A Parallel Tester Architecture for Accelerometer and Gyroscope MEMS Calibration and Test. J Electron Test 27, 389–402 (2011). https://doi.org/10.1007/s10836-011-5210-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s10836-011-5210-2

Keywords

Search

Navigation