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A physics-based electromigration reliability model for interconnects lifetime prediction

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Acknowledgements

This work was supported by National Natural Science Foundation of China (Grant No. 61674008) and National Key Research and Development (Grant No. 2016YFA0202101).

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Correspondence to Xiaoyan Liu or Xing Zhang.

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Appendix A. The supporting information is available online at info.scichina.com and link.springer.com. The supporting materials are published as submitted, without typesetting or editing. The responsibility for scientific accuracy and content remains entirely with the authors.

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Cai, L., Chen, W., Kang, J. et al. A physics-based electromigration reliability model for interconnects lifetime prediction. Sci. China Inf. Sci. 64, 219404 (2021). https://doi.org/10.1007/s11432-020-3140-4

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  • DOI: https://doi.org/10.1007/s11432-020-3140-4

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