Elsevier

Integration

Volume 10, Issue 2, January 1991, Pages 143-154
Integration

Efficient fracturing of all angle shaped VLSI mask pattern data

https://doi.org/10.1016/S0167-9260(06)80012-XGet rights and content

Abstract

Fracturing (i.e., filling area by rectangles) is one of the most important tasks of an artwork system for a pattern generator. Growing chip complexity requires efficient algorithms to perform this non-trivial data transformation. In order to solve this problem, we developed a fracture system using a new approach and improved algorithms. Its key features are the use of plane sweep techniques and the subdivision of the task in processing rectilinear shaped area and all angle shaped area. The manhattan area algorithm supplies an almost optimal rectangle dissection. The coverage of the remaining area is achieved in a good heuristical manner. Both algorithms guarantee to converge and find a complete filling. No restrictions are imposed on the area to be handled. The system has a time complexity of O(n log n). Additionally an outlook on hierarchical fracturing is presented.

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George Pelz was born in Wuppertal, West Germany, on December 16, 1962. He received the Diplom degree in Computer Science from the University of Dortmund, West Germany, 1988. Presently he is working at the Fraunhofer Institute of Microelectronic Circuits and Systems. His interests of research include computational geometry and VLSI layout design and verification. George Pelz is member of the Institute of Electrical and Electronics Engineers and the society of computer science (Gesellschaft für

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George Pelz was born in Wuppertal, West Germany, on December 16, 1962. He received the Diplom degree in Computer Science from the University of Dortmund, West Germany, 1988. Presently he is working at the Fraunhofer Institute of Microelectronic Circuits and Systems. His interests of research include computational geometry and VLSI layout design and verification. George Pelz is member of the Institute of Electrical and Electronics Engineers and the society of computer science (Gesellschaft für Informatik).

Volker Meyer zu Bexten was born in Hannover, West Germany, on July 15, 1962. In 1988 he received the Diplom degree in Computer Science from the University of Dortmynd, West Germany. He is presently working at the Fraunhofer Institute of Microelectronic Circuits and Systems. His area of reseach interests are computational geometry, VLSI layout verification and high-level synthesis. Mr. Meyer zu Bexten is member of the Institute of Electrical and Electronics Engineers.

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