Elsevier

Microelectronics Reliability

Volume 47, Issue 12, December 2007, Pages 2025-2057
Microelectronics Reliability

Introductory Invited Paper
Study of the electrolyte-insulator-semiconductor field-effect transistor (EISFET) with applications in biosensor design

https://doi.org/10.1016/j.microrel.2006.10.003Get rights and content

Abstract

This paper presents a comprehensive review of the ion-sensitive field-effect transistor (ISFET) and its applications in biomolecular sensing and characterization of electrochemical interfaces. An introduction to the physics of field-effect transistors is presented, followed by a study of the properties of electrolytic solutions and electrolyte interface surface effects. Full modeling of the ion-sensitive transistor is given, followed by a survey of the different uses of the ISFET in biomedical and environmental applications. Particular attention is given to the use of the ion-sensitive transistors as replacements for microarrays in DNA gene expression analysis.

Introduction

Current trends in health science and biomedical research indicate a continuous need for technologies that allow for the achievement of accurate measurements and consistent results [1], [2], [3]. Given the stochastic nature of the experiments studied in the biomedical realm, it is necessary to eliminate errors and inconsistencies that arise from poorly prepared environments. Generally, discrepancies in biomedical experiments come as results of secondary reactions or unwanted side-effects, many of which could be avoided in more controlled environments or using highly purified experimental chambers [1]. During the past few decades, advances in device fabrication technology has enabled a high degree of control over fabrication processes, allowing for high levels of integration and very predictable device performance characteristics [4], [5]. This shared interest in quality of experiment suggests the need to study means of integrating semiconductor fabrication technology with biological and chemical environments to achieve better experimental outcomes in health science and biomedical applications.

Most chemical and biomedical tests and experiments are conducted inside laboratories with a large number of expensive equipment [3], [6], [7], [8]. It is therefore very difficult to conduct environmental or medical tests in rural areas. The specimen to be tested would have to be transported to a lab that has the required equipment, which could be geographically distant. In many cases, the specimen must be preserved under specific environmental conditions while being transported and the possibility of sample deterioration or contamination always exists [9]. These difficulties can be overcome if such experiments could be conducted using small, inexpensive, easy-to-use portable devices. The semiconductor industry allows for the integration of many advanced instrumentation and analysis circuits in a relatively small area [10]. Therefore, if one can combine the chemical or biological medium with that of the semiconductor and integrated circuit, then the idea of an integrated analysis chip would be a reality. Biochemical sensors could then be integrated with semiconductors and inexpensive, miniature “labs” could then be realized in small devices.

Many biochemical experiments use large quantities of analyte samples, catalysts, and detectors. This is done for many reasons, the most important of which are the limited sensitivity of many detection schemes, and the limited amount of control over the dynamics of the experiments [3]. The large quantities result in the need for sophisticated equipment for data analysis and complicated algorithms for interpretation [9]. If such experiments could be conducted with extremely small quantities of reactants, one would expect more correlated results, less complex equipment for sensing, and possibly less time for conducting the experiment. However, constructing biochemical sensors for small quantities of reactants requires a large degree of sensitivity. Field-effect devices, fabricated using semiconductor technology, provide excellent candidates for constructing such sensors, due to the high level of purity in the design [4], and the extremely small dimensions that can be used [8], all of which enhance the potential sensitivity of the device. Therefore, the idea of integrating the biochemical domain to that of microelectronics and integrated circuits seems quite appealing.

Much research has been devoted to realizing a device that would couple chemical and biological media with semiconductor integrated circuits [1], [6], [7], [11], [12], [13]. In this paper, one of these devices, the electrolyte–insulator–semiconductor field-effect transistor (EISFET), is presented. The EISFET provides means of detecting various biological and chemical processes by charge coupling. This coupling allows for electrical recording of biomolecular activities that occur in the vicinity of the EISFET [1]. Such sensors can be used extensively for monitoring chemical and biological contaminations, studying molecular interactions, and gene expression analysis.

In this review, first, a physical analysis of a traditional field-effect transistor is presented. After that, characterization of electrochemical surface bulk and processes will be presented, followed by an analysis of the EISFET structure. Then, the use of the EISFET as a biochemical sensor will be studied, and a thorough analysis of using the EISFET as a DNA hybridization sensor will be given. Finally, a comparison between current optical microarray technology and the upcoming EISFET-based microarrays will be presented.

Section snippets

Physical treatment of the MOSFET

Physical characterization of MOS transistors has been a subject of intense research, and physical models for MOSFETs appear in different texts [4], [5]. For completeness, the basic physical modeling of MOSFET transistors is presented here.

Fig. 1 shows a simplified diagram of a generic silicon enhancement-type n-channel MOSFET. It consists of four terminals: The source (S), the drain (D), the gate (G) and the body (B). The region between the source and drain is called the channel. The gate is

Electrochemistry of ionic solutions

Most biological and chemical experiments are conducted in ionic solutions (electrolytes) [1]. This is due to the fact that polar solutions (such as water) can easily break up strong ionic bonds and cause reactants to be more chemically active. Fig. 5 depicts a general structure of an ionic solution containing one positive species and one negative, both having a valence of 1. Such a solution is often referred to as a 1:1 solution [16]. An example of such a solution is NaCl, or KCl, dissolved in

Charge transport in electrolytes

Electrical transport phenomena in ionic solutions are quite different from those in metals and semiconductors, primarily because the elements of conduction in ionic solutions are ions, not electrons. In addition, the ionic carriers can be chemically active and can react with surfaces. It is therefore important to include chemical phenomena in the treatment of ionic conduction. Generally, conduction in electrolytes involves applying a bias from electronic circuits. The charge carriers behave

The structure of the EISFET

A simplified diagram of the EISFET is shown in Fig. 15 [6]. It consists of a regular MOSFET structure, including the source, drain and body contacts. However, in the EISFET, the gate contact is removed and replaced by an electrolytic solution and a reference electrode. The main purpose of this structure is to enable efficient coupling of the electrolytic area with the electronic substrate. Such a structure can allow electronic sensing of chemical and biological processes [8], as will be shown

The EISFET as a sensor

It was shown previously how the operation of the EISFET can be altered by changing the electrolyte’s surface potential. This can be utilized to construct different types of chemical and biological sensors. The method by which the electrolyte’s potential is changed can be different depending on the type of sensor. However, most methods depend on changing the charge population within this area. Depending on the nature of the experiment, reactants, or the phenomena leading to this charge

Recent application: the BioFET

After having reviewed the main semiconductor and electrochemical phenomena that are relevant to the study of the EISFET, a very recent application of the EISFET is introduced here: the ability of the EISFET to detect charges from large biological molecules. The discussion here will be limited to the detection of DNA sequences. However, it is worth mentioning that the EISFET has been used with various different biological species, including proteins [35], neurons [36], cells [37], and even

Nanostructures

The use of nanostructures as efficient sites for biological sensors has enjoyed a great deal of attention [57], [58], [59], [60], [61]. Nanostructures and porous structures have a large surface area and can be used for better biological detection. Examples of such structures are carbon nanotubes, SiO2 and MnO2 nanoparticles, and nanopores. These nanostructures can greatly enhance the sensitivity of DNA sensors by providing a lot of binding and hybridization sites for the same BioFET area.

Conclusion

Since its introduction over 30 years ago, the EISFET has been able to demonstrate efficiency in detecting various chemical and biological phenomena to a high degree of accuracy. By substituting conventional ion-sensitive glass electrodes with EISFETs, a good degree of sensitivity can be achieved, while achieving longer life time due to the high durability of silicon-based EISFETs, and seamless integration with the semiconductor fabrication technology. Using EISFETs as DNA sensors in arrays, one

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