Event graph modeling of a homogeneous job shop with bi-inline cells

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Abstract

In modern electronics Fabs, most production lines consist of inline cells that have processing machines along the conveyor line inside. In this type of Fab, a large number of different products are loaded concurrently, which requires a production simulator to analyze the planning and scheduling of the Fab operations. In order to build such a simulator, (1) a typical TFT-LCD Fab is simplified into a job shop consisting only of bi-inline cells and (2) the job shop is represented as an event graph model. This type of job shop consisting only of machines of the same type is referred to as homogeneous job shop. The event graph model was verified using SIGMA and sample input data. However, if a production line contains uni-inline cells as well as bi-inline cells, we need a heterogeneous job shop model and this requires further study.

Introduction

In modern electronics Fabs such as TFT-LCD Fabs, most production systems consist of inline cells, which we call an inline production system [1]. Unlike a simple table-type machine which processes a part at a time, an inline cell consists of an inner conveyor which carries the parts through the equipment and multiple subordinate processing machines along the conveyor belt [2]. Inline cells are connected by an automated material handling system (AMHS) such as inline stockers and conveyors [3]. In TFT-LCD Fabs, the glasses are stored in a container called cassette while they travel among the inline cells. Once a cassette full of glasses arrives at the ports in front of an inline cell, a robot moves the glasses one by one onto the conveyor belt. Similarly, the processed glasses are unloaded to an empty cassette by another robot. In this type of Fab, a large number of different parts are processed simultaneously in the same line. When the processing requirements are different from one part type to another, the inline cell needs a set-up before it starts to process a part of different type. The more this kind of part-type change occurs, the longer the idle time of the inline cell becomes. As a result, there is an increasing demand for a simulator that can analyze the efficiency of planning and scheduling of inline production system [4].

Many commercial simulation packages have been introduced to simulate an inline production system: ASAP (AutoSched AP™) is one of the most popular tools for production simulation [5], [6], [7]. However, a simulator implemented with a commercial package generally has less flexibility than the one implemented based on a well-defined formal model. This paper presents a systematic method of building a formal event graph model that can be implemented into a simulator of an inline production system.

The inline cells in TFT-LCD Fabs are largely classified into two groups: bi-inline cells and uni-inline cells. This classification is based on whether the loading ports and the unloading ports of the cell are separated or not. A bi-inline cell has two types of separated ports: in-ports for loading new glasses from a cassette and out-ports for unloading finished glasses into a cassette. It has two glass-handling robots: a track-in robot at the in-port section and a track-out robot at the out-port section.

In this paper, an event graph model of a homogeneous job shop with bi-inline cells is proposed. To verify the model, the commercial simulation package SIGMA® is used for the implementation and testing of the model [8]. SIGMA is the most widely used simulation tool to build, test, animate and experiment event graph models. The formal model provided in this paper may be considered as a starting point for building a production simulator for performance analysis of a target TFT-LCD Fab. In uni-inline cells, on the other hand, in-ports and out-ports are not separated and the loading and unloading of the glasses are handled by one robot. A feature of uni-inline cell is that the glasses are unloaded to the cassette where they were contained at the arrival to the cell. (In bi-inline cell, processed glasses are unloaded to a new cassette.) An event graph model of homogeneous job shop with uni-inline cells has already been suggested in a previous work [2]. In order to make the paper self-contained, the result of our previous work is summarized in Appendix A.

A hypothetical example of modern TFT-LCD Fab layout is depicted in Fig. 1. As shown in the figure, a uni-inline cell is connected to one inline stocker through in/out-ports, whereas a bi-inline cell has separate in-ports and out-ports. In-port and out-port of a bi-inline cell are often connected to different inline stockers. If the material handling processes are simplified, this Fab can be viewed as a typical job shop consisting of inline cells.

Section snippets

Formal representation of job shop

General job-shop models are used to represent manufacturing systems as well as service systems in various formalisms. A formal model may be described either using an algebraic syntax or in a well defined graph form. An event graph is a formal model which is quite simple yet extremely powerful and natural to represent a discrete-event system [9]. In event graphs, the influence of events on the state variables is represented by vertices and the relationships between events are represented as

Reference model of bi-inline cell

In the job shop model, the objects included in the system can be divided into two categories: resident entities and transient entities [14]. A resident entity such as a server or machine resides in the system, whereas a transient entity such as a customer or part constantly enters and leaves the system after being served by resident entities [8]. In the job shop model presented in this paper, bi-inline cells are resident entities and the cassettes arriving in the queue of a cell are transient

Cassette loading section modeling

Fig. 3 provides a detailed illustration of events occurring at the cassette-loading section of the bi-inline cell presented in Fig. 2. There are four events defined in this section:

  • 1.

    Queue: A cassette arrives in the queue of the bi-inline cell.

  • 2.

    X2PI: The cassette moves to the in-port of the bi-inline cell.

  • 3.

    FGL: start of First-Glass-Loading (including the set-up time).

  • 4.

    LGL: end of Last-Glass-Loading (the robot finishes loading the last glass in a cassette).

The state variables used in this section are

Implementation with SIGMA

In this section, the event graph model of the bi-inline cell implemented with SIGMA is presented and the results of virtual TFT-LCD Fab with sample input data are illustrated in Fig. 8 for verification. This virtual line manufactures two types of products: 4-mask and 5-mask (i.e., gate, active, source-drain, passivation and pixel layers) with different processing steps (i.e., cleaning, deposition, photolithography, and etching) with eight bi-inline cells, and two identical machines for each

Conclusions

Presented in the paper is a systematic procedure for constructing an event graph model of a homogeneous job shop consisting of bi-inline cells. First, the bi-inline cell is divided into two sections, cassette loading section and cassette unloading section, to construct an event graph model for each section. Secondly, these two event graph models are combined to form an event graph model of the entire bi-inline cell. Finally, the event graph model of the bi-inline cell is parameterized to

Acknowledgements

The authors would like to thank Joo-Young Lim for her precious help on building a SIGMA model of the parameterized event graph model of Fig. 7b.

References (14)

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