Hostname: page-component-76fb5796d-9pm4c Total loading time: 0 Render date: 2024-04-26T10:26:23.124Z Has data issue: false hasContentIssue false
  • English
  • Français

Model development and boundary interaction force control of a piezoresistive-based microcantilever

Published online by Cambridge University Press:  13 June 2014

Sohrab Eslami  and
Nader Jalili
Sohrab Eslami
Affiliation:
Laboratory for Computational Sensing and Robotics, ERC—Computer Integrated Surgical Systems and Technology, Johns Hopkins University, Baltimore, MD 21218, USA
Nader Jalili*
Affiliation:
Piezoactive Systems Laboratory, Department of Mechanical and Industrial Engineering, Northeastern University, Boston, MA 02115, USA
*
*Corresponding author. E-mail: n.jalili@neu.edu
Get access Rights & Permissions [Opens in a new window]

Summary

Robots with micro- and nanoresolution of motion are becoming more practical and useful in many precision manufacturing processes and industries such as medical instruments and imaging tools. Apparently, the most important features of these devices are their precision and durability. As accuracy increases, more delicate tasks may be performed. Along this line, a spatial micromanipulator with three revolute–revolute–prismatic joints while equipped with nanometer motion resolution is considered here. At the end of the micromanipulator, a piezoresistive-based microcantilever operates as a force sensor to quantify the amount of the strain generated in the microcantilever and transduces it into a proper voltage for force sensing applications. In terms of the controller design, the value of the produced voltage can further be implemented as the feedback entering into the control loop and making the control unit to produce appropriate signals for manipulating the robot arm. A challenging and important problem is the need to control the applied boundary forces at the contact zone with external objects (specifically the biological samples). The ability to control the interaction force is of most interest today which has numerous applications in precision manufacturing and biomedical engineering. For this purpose, two types of controllers are presented here: a Lyapunov-based proportional-derivative (PD) controller and a robust adaptive (RA) controller. The performance and the stability of these two controllers are examined and discussed thoroughly in this paper so that it can be interpreted that the robust adaptive controller is robust under presence of uncertainties in force tracking control purposes.

Keywords

Hybrid rigid-flexible micromanipulatorPiezoresistive microcantileverStatic/Dynamic boundary force controlLyapunov-based PD and robust adaptive control
Type
Articles
Information
Robotica , Volume 34 , Issue 2 , February 2016 , pp. 328 - 346
Copyright
Copyright © Cambridge University Press 2014 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Kleindiek, S., MM3A® Micromanipulator, http://www.nanotechnik.com/mm3a-em.htmlGoogle Scholar
2.Flückiger, M., “Cell membrane mechanical modeling for microrobotic cell manipulation,” Diploma Thesis WS2003/2004 (Zurich, Switzerland: IRIS Institute of Robotics and Intelligent Systems, ETHZ Swiss Federal Institute of Technology).Google Scholar
3.Guthold, M., Falvo, M. R., Matthews, W. G., Paulson, S., Washburn, S., Erie, D., Superfine, R., Brooks, F. P. and Taylor, R. M., “Controlled Manipulation of Molecular Samples with the Nanomanipulator,” IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Atlanta, USA (1999) pp. 3–8.Google Scholar
4.Li, G., Xi, N., Yu, M. and Fung, W.K., “3D Nanomanipulation Using Atomic Force Microscopy”, IEEE International Conference on Robotics and Automation, Taipei, Taiwan (2003) pp. 3642–3647.Google Scholar
5.Yang, Y., Dong, Z., Li, M. and Li, J. W., “A Programmable AFM-Based Nanomanipulation Method Using Vibration-Mode Operation,” IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Sanya, China (2008) pp. 681–685.Google Scholar
6.Giouroudi, I., Hötzendorfer, H., Andrijasevic, D., Ferros, M. and Brenner, W., “Design of Microgripping System with Usual and Force Feedback for MEMS Application,” IEEE, the Institution of Engineering and Technology Seminar on MEMS Sensors and Actuators, London, UK (2006) pp. 243–250.CrossRefGoogle Scholar
7.Saeidpourazar, R. and Jalili, N., “Towards fused vision and force robust feedback control of nanorobotic-based manipulation and grasping,” Mechatronics 18, 566–577 (2008).CrossRefGoogle Scholar
8.Choura, S. and Yigit, A. S., “Control of a two-link rigid-flexible manipulator with a moving payload mass,” J. Sound Vib. 243 (5), 883–897 (2011).CrossRefGoogle Scholar
9.Ata, A. A. and Johar, H., “Dynamic simulation of task constrained of a rigid-flexible manipulator,” Int. J. Adv. Robot. Syst. 1 (2), 61–66 (2004).CrossRefGoogle Scholar
10.Fenili, A. and Balthazar, J. M., “The rigid-flexible nonlinear robotic manipulator: Modeling and control,” Commun. Nonlinear Sci. Numer. Simul. 16, 2332–2341 (2011).CrossRefGoogle Scholar
11.Chu Duc, T., Creemer, J. F. and Sarro, P. M., “Piezoresistive cantilever beam for force sensing in two dimensions,” IEEE Sensors J. 7 (1), 96–104 (2007).CrossRefGoogle Scholar
12.Park, S. J., Petzold, B. C., Goodman, M. B. and Pruitt, B. L., “Piezoresistive cantilever force-clamp system,” Rev. Sci. Instrum. 82, 043703 (10pp) (2011).CrossRefGoogle ScholarPubMed
13.Behal, A., Dixon, W., Dawson, D. M. and Xian, B., Lyapunov-Based Control of Robotic Systems (CRC Press, Boca Raton, FL, 2009).CrossRefGoogle Scholar
14.Lewis, F. R., Dawson, D. M. and Abdallah, C. T., Robot Manipulator Control: Theory and Practice (Marcel Dekker, Inc., New York, 2004).Google Scholar
15.Dixon, W. E., Nagarkatti, S., Dawson, D. M. and Behal, A., Nonlinear Control of Engineering Systems: A Lyapunov-Based Approach (Birkhäuser Boston, New York, 2003).CrossRefGoogle Scholar
16.de Queiroz, M. S., Dawson, D. M., Nagarkatti, S. P. and Zhang, F., Lyapunov-Based Control of Mechanical Systems (Birkhäuser Boston, New York, 2000).CrossRefGoogle Scholar
17.Qu, Z. and Dawson, D. M., Robust Tracking of Control of Robot Manipulators (IEEE, 1996).Google Scholar
18.Kleindiek® CD, fms-em-v3.07 manual.Google Scholar
19.Craig, J. J., Introduction to Robotics: Mechanics and Control, 2nd ed. (Addison-Wiley, Reading, MA, 1989).Google Scholar
20.Dadfarnia, M., Jalili, N., Xian, B. and Dawson, D. M., “A Lyapunov-based piezoelectric controller for flexible Cartesian robot manipulators,” ASME J. Dyn. Syst. Meas. Control 126 (2), 347–358 (2004).CrossRefGoogle Scholar
21.Eslami, S. and Jalili, N., “A comprehensive modeling and vibration analysis of AFM microcantilevers subjected to nonlinear tip–sample interaction forces,” Ultramicroscopy 117, 31–45 (2012).CrossRefGoogle ScholarPubMed
22.Tetard, L., Passian, A., Eslami, S., Jalili, N., Farahi, R. H. and Thundat, T., “Virtual resonance and frequency difference generation by van der Waals interactions,” Phys. Rev. Lett. 106 (18), 180801 (4pp) (2011).CrossRefGoogle Scholar
23.Zhou, Y., Nelson, B. and Vikramaditya, B., “Fusing Force and Vision Feedback for Micromanipulation,” Proceeding of the 1998 IEEE, International Conference on Robotics and Automation, Leuven, Belgium (May, 1998).Google Scholar
24.Boisen, A., Thaysen, J., Jensenius, H. and Hansen, O., “Environmental sensors based on micromachined cantilevers with integrated read-out,” Ultramicroscopy 82, 11–16 (2000).CrossRefGoogle ScholarPubMed
25.Yang, S. M. and Yin, T. I., “Design and analysis of piezoresistive microcantilever for surface stress measurement in biological sensor,” Sensors Actuators 120, 734–744 (2007).CrossRefGoogle Scholar
26.Jalili, N., Piezoelectric-Based Vibration Control: From Macro to Micro/Nano Scale Systems, ISBN: 1441900691, 1st ed. (Springer, NY, 2010).CrossRefGoogle Scholar
27.Slotine, J. and Li, W., Applied Nonlinear Control (Prentice Hall Co., Englewood Cliffs, NJ, 1991).Google Scholar
28.Eslami, S. and Jalili, N., “Adaptive trajectory control of microcantilever's tip utilised in atomic force microscopy-based manipulation,” Int. J. Control 84 (12), 1945–1955 (2011).CrossRefGoogle Scholar
29.Eslami, S., Zareian, R. and Jalili, N., “Integrated automated nanomanipulation and real-time cellular surface imaging for mechanical properties characterization,” Rev. Sci. Instrum. 83 (10), 105002 (16pp). (Oct. 2012).CrossRefGoogle ScholarPubMed