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Design of 1 m2 Order Plasma Excitation Single-Layer Slotted Waveguide Array with Conducting Baffles and Quartz Glass Strips Using the GSM-MoM Analysis
Takuichi HIRANO Kimio SAKURAI Jiro HIROKAWA Makoto ANDO Tetsuya IDE Atsushi SASAKI Kazufumi AZUMA Yukihiko NAKATA
Publication
IEICE TRANSACTIONS on Communications
Vol.E89-B
No.5
pp.1627-1635 Publication Date: 2006/05/01 Online ISSN: 1745-1345
DOI: 10.1093/ietcom/e89-b.5.1627 Print ISSN: 0916-8516 Type of Manuscript: PAPER Category: Antennas and Propagation Keyword: slotted waveguide arrays, unit cell, plasma, generalized scattering matrix method, method of moments, baffles,
Full Text: PDF(1.4MB)>>
Summary:
The authors have proposed a 1 m2 single-layer slotted waveguide array consisting of conducting baffles and quartz glass strips positioned in front of the slot aperture, which is referred to as a vacuum window, for microwave plasma excitation. The effect of the complicated outer vacuum window hinders the realization of uniform distribution. In this paper, a unit-cell of the alternating-phase fed single-layer slotted waveguide array with the vacuum window is analyzed by generalized scattering matrix method (GSM)-method of moments (MoM) hybridization analysis, and the array is designed to realize uniform aperture electromagnetic field distribution, where the plasma and the chamber is neglected. The GSM-MoM analysis gives reliable numerical results while the MoM has numerical errors due to singularities of Green's function for a long cavity. Uniform aperture EM field distribution outside of the vacuum window is observed in near field measurements using a 1/5 scale model antenna, and the validity of the analysis and design is verified.
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