Tunable Vertical Comb for Driving Micromirror Realized by Bending Device Wafer

Minoru SASAKI
Masahiro ISHIMORI
JongHyeong SONG
Kazuhiro HANE

Publication
IEICE TRANSACTIONS on Electronics   Vol.E90-C    No.1    pp.147-148
Publication Date: 2007/01/01
Online ISSN: 1745-1353
DOI: 10.1093/ietele/e90-c.1.147
Print ISSN: 0916-8516
Type of Manuscript: Special Section LETTER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
Keyword: 
micromirror,  tuning,  vertical comb,  wafer bending,  

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Summary: 
An electrostatically driven micromirror is described. The vertical comb of a three-dimensional microstructure is realized by bending the device wafer having microstructures. By resetting the bending angle, the tuning of the vertical gap between moving and stationary combs is possible. The characteristics of the vertical comb drive actuator can be tuned, confirming the performance.