Fixture‐based industrial robot calibration for silicon wafer handling

Semiconductor manufacturing industry requires highly accurate robot operation with short install/setup downtime.

We develop a fast, low cost and easy‐to‐operate calibration system for wafer‐handling robots. The system is defined by a fixture and a simple compensation algorithm. Given robot repeatability, end effector uncertainties, and the tolerance requirements of wafer placement points, we derive fixture design and placement specifications based on a statistical tolerance model.

By employing the fixture‐based calibration, we successfully relax the tolerance requirement of the end effector by 20 times.

Semiconductor manufacturing requires fast and easy‐to‐operate calibration systems for wafer‐handling robots. In this paper, we describe a new methodology to solve this problem using fixtures. We develop fixture design criteria and a simple compensate algorithm to satisfy calibration requirements. We also verify our approach by a physical example.