Abstract:
We demonstrate a method for stacking and connecting KGD on each other. The method requires no pre-processing of the ICs and die placement can be done using standard pick ...Show MoreMetadata
Abstract:
We demonstrate a method for stacking and connecting KGD on each other. The method requires no pre-processing of the ICs and die placement can be done using standard pick and place machines. This novel process allows creating >200um high lithographically defined interconnects and is a simple, scalable and low cost alternative to other techniques for interconnecting 3D stacked ICs.
Date of Conference: 01-03 December 2014
Date Added to IEEE Xplore: 09 July 2015
Electronic ISBN:978-1-4799-8472-5