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Activation of Copper Surfaces by VUV - Redox Method Using a Xenon Excimer Lamp | IEEE Conference Publication | IEEE Xplore

Activation of Copper Surfaces by VUV - Redox Method Using a Xenon Excimer Lamp


Abstract:

A technology (Vacuum ultraviolet ozone (VUV/O3) modification is known that uses 172 nm vacuum ultraviolet light generated from a xenon excimer lamp to modify the surface ...Show More

Abstract:

A technology (Vacuum ultraviolet ozone (VUV/O3) modification is known that uses 172 nm vacuum ultraviolet light generated from a xenon excimer lamp to modify the surface of a material. However, in the VUV/O3 modification method, the surface of the treated material becomes hydrophilic as it is covered with oxidizing functional groups due to the action of active oxygen generated by the high-energy vacuum ultraviolet light. At the same time, the original properties of the sample surface are weakened. In cases where metals are to be joined, it is desirable to have little organic contamination and no oxide film. In this study, we report the experimental results of surface activation of copper samples using the VUV-Redox method, which irradiates vacuum ultraviolet light in reduction gas and redox gas.
Date of Conference: 25-27 September 2024
Date Added to IEEE Xplore: 14 January 2025
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Conference Location: Sendai, Japan

References

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