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Adaptive run to run control for intermittent batch operations | IEEE Conference Publication | IEEE Xplore

Adaptive run to run control for intermittent batch operations


Abstract:

Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper propo...Show More

Abstract:

Process reproducibility is a challenging problem in semiconductor manufacturing as the component size shrinks and the manufacturing complexity increases. This paper proposes a new adaptive run-to-run controller for intermittent batch operations and applies it to a rapid thermal annealing (RTA) process at Advanced Micro Devices (AMD). The adaptive controller has a self-monitoring component and requires little process knowledge to set up. The success of the controller is demonstrated on an AST SHS 2800 RTA system.
Date of Conference: 08-10 May 2002
Date Added to IEEE Xplore: 07 November 2002
Print ISBN:0-7803-7298-0
Print ISSN: 0743-1619
Conference Location: Anchorage, AK, USA

References

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