Feedback loop design for an electrostatic voltmeter | IEEE Conference Publication | IEEE Xplore

Feedback loop design for an electrostatic voltmeter


Abstract:

The integration of MEMS sensors and interface circuitry has yielded low-cost, high-performance instruments with excellent reliability. In inertial sensing, deterministic ...Show More

Abstract:

The integration of MEMS sensors and interface circuitry has yielded low-cost, high-performance instruments with excellent reliability. In inertial sensing, deterministic electrical waveforms are applied to a MEMS capacitive element to determine an unknown deflection. The inverse of this measurement method can also be exploited: the MEMS element can be deterministically modulated to measure an unknown electrical variable. This paper presents the design of a non-contact electrostatic voltmeter using a MEMS-based electrostatic field meter
Date of Conference: 14-16 June 2006
Date Added to IEEE Xplore: 24 July 2006
ISBN Information:

ISSN Information:

Conference Location: Minneapolis, MN, USA

Contact IEEE to Subscribe

References

References is not available for this document.