Frequency domain identification is a common starting point for model based motion control. The aim of this paper is to tailor parametric identification methods to the specific class of motion systems. The proposed method involves two aspects: 1) incorporating prior knowledge, e.g. it is often known beforehand that the system exhibits rigid-body behavior, and 2) numerical reliability, since the considered class of systems is challenging to identify. The result is a frequency domain algorithm that is particularly suited for the identification of lightly damped motion systems with rigid body behavior, a high model order, and large input- output dimensions. Experimental results on a prototype next-generation motion system clearly demonstrate the advantages of the proposed approach.