A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity | IEEE Conference Publication | IEEE Xplore

A 8-resistor SU-8 accelerometer with reduced cross axis sensitivity


Abstract:

The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheat...Show More

Abstract:

The MEMS accelerometer has a high cross sensitivity due to proof mass being eccentric. This paper gives results for a SU-8 z-axis accelerometer that uses 8-resistor Wheatstone-bridge to reduce the x-axis and y-axis cross sensitivity by 2 orders of magnitude compared to the conventional 4-resistor Wheatstone-bridge arrangement.
Date of Conference: 06-09 December 2010
Date Added to IEEE Xplore: 27 May 2011
ISBN Information:
Conference Location: Kuala Lumpur, Malaysia

References

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