Thermal problem is serious in 3D IC since its high power density. Through Silicon Via (TSV) becomes a main heat dissipation path because of the relatively high thermal conductivity as compared to silicon substrate. To efficiently manage thermal-aware TSV distribution, in this paper an equilateral triangle grid distributing method is proposed and is tested on a benchmark. Finite element models are established to study the advantage of this method. It is concluded that under the same condition, the average temperature of equilateral triangle grid distribution is optimized up to 0.9% than square grid distribution in tested model groups.