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A Vertical Thin Layer pLDMOS with Linear doping realizing ultralow Ron,sp | IEEE Conference Publication | IEEE Xplore

A Vertical Thin Layer pLDMOS with Linear doping realizing ultralow Ron,sp


Abstract:

A pLDMOS with vertical thin layer (VTL-pLDMOS) to obtain ultra-low Ron,sp (specific on-resistance) is proposed and investigated by TCAD tools in this paper. The vertical ...Show More

Abstract:

A pLDMOS with vertical thin layer (VTL-pLDMOS) to obtain ultra-low Ron,sp (specific on-resistance) is proposed and investigated by TCAD tools in this paper. The vertical thin layer is linearly doped and a vertical Field Plate (FP) is used to terminate the electric field in the N-drift region. As a result, the electric field in the thin layer is uniformly distributed and the cell pitch is dramatically reduced, leading to a high breakdown-voltage (BV) and ultra-low Ron,sp. Simulation results confirm that for a 300 V pLDMOS, Ron,sp is reduced by 84% and 54% compared with those the p-type and n-type Triple RESURF "silicon limit", respectively. Moreover, Ron,sp of the proposed pLDMOS is 33% reduced even compared with that of an Enhanced RESURF Trench SOI pLDMOS (ERT-pLDMOS).
Date of Conference: 26-29 October 2021
Date Added to IEEE Xplore: 01 December 2021
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Conference Location: Kunming, China

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