Processing math: 16%
SiGe HBTs with <span class="MathJax_Preview">{f_{T}/f_{\max}\,\sim\,375/510GHz}</span><script type="math/tex" id="MathJax-Element-1">{f_{T}/f_{\max}\,\sim\,375/510GHz}</script> Integrated in 45nm PDSOI CMOS | IEEE Conference Publication | IEEE Xplore

SiGe HBTs with {f_{T}/f_{\max}\,\sim\,375/510GHz} Integrated in 45nm PDSOI CMOS


Abstract:

A 45nm BiCMOS process, based on PDSOI CMOS, with SiGe HBT NPNs having {f_{T}f_{\max}\,=\,375/510GHz} is presented. The bipolars are integrated on a PDSOI wafer in an ep...Show More

Abstract:

A 45nm BiCMOS process, based on PDSOI CMOS, with SiGe HBT NPNs having {f_{T}f_{\max}\,=\,375/510GHz} is presented. The bipolars are integrated on a PDSOI wafer in an epitaxial region above the handle wafer to avoid self-heating concerns. To our knowledge, this is the first time a high performance SiGe BiCMOS process has been demonstrated on a PDSOI wafer. In addition to the HBTs, the technology features high performance NFETs with {f_{T}f_{MAX}\,=\,265/330GHz} and PFETs with {f_{T}f_{MAX}\,=\,250/340GHz} enabling flexibility in circuit design. A full-flow demonstration PDK, digital standard cell and IO cell libraries have been released for experimental circuit design work. This work, funded under the DARPA T-MUSIC program, will address future extensions to higher HBT performance and more-advanced CMOS nodes.
Date of Conference: 05-08 December 2021
Date Added to IEEE Xplore: 25 January 2022
ISBN Information:
Conference Location: Monterey, CA, USA

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