Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes | IEEE Conference Publication | IEEE Xplore

Control and Rotation Rate Estimation of Vibrational MEMS Gyroscopes


Abstract:

There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varyin...Show More

Abstract:

There are two major control problems associated with vibrational MEMS gyroscopes: to control two vibrating axes (or modes) of the gyroscope, and to estimate a time-varying rotation rate. This paper demonstrates how a novel active disturbance rejection control addresses these problems in the presence of the mismatch of natural frequencies between two axes, mechanical-thermal noises, quadrature errors, and parameter variations. A demodulation approach based on the estimated dynamics of the system by an extended state observer is proposed to estimate the rotation rate. The simulation results on a Z-axis MEMS gyroscope show that the controller is very effective by driving the output of the drive axis to a desired trajectory, forcing the vibration of the sense axis to zero for a force-to-rebalance operation and precisely estimating the rotation rate.
Date of Conference: 01-03 October 2007
Date Added to IEEE Xplore: 27 November 2007
ISBN Information:
Print ISSN: 1085-1992
Conference Location: Singapore

References

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