Since the dynamic characteristics of the linear ultrasonic motor (LUSM) are highly nonlinear and time varying, it is difficult to design a suitable motor position controller to achieve high-precision position control at all time. An intelligent robust tracking control (IRTC) system employs a dynamics wavelet-based cerebellar model articulation controller (DWCMAC) is developed for LUSMs. The dynamic structure of DWCMAC has superior capability to the conventional static cerebellar model articulation controller (CMAC) in efficient learning mechanism and dynamic response. In the IRTC design, the Taylor linearization technique is employed to increase the learning ability of DWCMAC and the on-line adaptive laws are derived based on the Lyapunov stability analysis, the sliding mode control methodology and the H" control technique so that the stability of the closed-loop system and H" tracking performance can be guaranteed. Then, the effectiveness of the proposed control system is verified by the experiments of LUSM motion control. Experimental results show that high-precision tracking performance can be achieved by using the proposed IRTC system.