Abstract:
This paper presents the first reported CMOS 2-in-1 relative humidity (RH) and temperature (Temp) sensor. A unified analog front-end (AFE) interfaces two on-chip transduce...Show MoreMetadata
Abstract:
This paper presents the first reported CMOS 2-in-1 relative humidity (RH) and temperature (Temp) sensor. A unified analog front-end (AFE) interfaces two on-chip transducers and converts the resistance (a Temp) and capacitance (a RH) into a frequency. This conversion occurs with high linearity (±10 ppm error) across the industrial temperature range (-40 to + 85°C) via a frequency-locked loop (FLL). An incomplete-settling switched-capacitor (SC)-based Wheatstone bridge (WhB) is proposed to sense the Rand C in a power-efficient fashion. The FLL output is digitized by a low power, time-to-digital converter (TDC) that has high resolution due to the inherent quantization noise-shaping. This system achieves excellent resolution figure-of-merits (FOMs) when normalized to RH (0.83pJ·(%RH)2) and temperature (62 fJ·K2).
Published in: 2019 IEEE Custom Integrated Circuits Conference (CICC)
Date of Conference: 14-17 April 2019
Date Added to IEEE Xplore: 01 August 2019
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