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Calibration of Wafer Handling Robots: A Fixturing Approach | IEEE Conference Publication | IEEE Xplore

Calibration of Wafer Handling Robots: A Fixturing Approach


Abstract:

Semiconductor manufacturing industry requires highly accurate robot operation with short install/setup downtime. We develop a fast, low cost and easy-to-operate calibrati...Show More

Abstract:

Semiconductor manufacturing industry requires highly accurate robot operation with short install/setup downtime. We develop a fast, low cost and easy-to-operate calibration system for wafer-handling robots. The system is defined by a fixture and a simple compensation algorithm. Given robot repeatability, end-effector uncertainties, and the tolerance requirements of wafer placement points, we derive fixture design and placement specifications based on a deterministic tolerance model. By employing the fixture-based calibration, we successfully relax the tolerance requirement of the end-effector by 20 times.
Date of Conference: 22-25 September 2007
Date Added to IEEE Xplore: 08 October 2007
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Conference Location: Scottsdale, AZ, USA

References

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