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A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation | IEEE Conference Publication | IEEE Xplore

A predictive maintenance system for integral type faults based on support vector machines: An application to ion implantation


Abstract:

In semiconductor fabrication processes, effective management of maintenance operations is fundamental to decrease costs associated with failures and downtime. Predictive ...Show More

Abstract:

In semiconductor fabrication processes, effective management of maintenance operations is fundamental to decrease costs associated with failures and downtime. Predictive Maintenance (PdM) approaches, based on statistical methods and historical data, are becoming popular for their predictive capabilities and low (potentially zero) added costs. We present here a PdM module based on Support Vector Machines for prediction of integral type faults, that is, the kind of failures that happen due to machine usage and stress of equipment parts. The proposed module may also be employed as a health factor indicator. The module has been applied to a frequent maintenance problem in semiconductor manufacturing industry, namely the breaking of the filament in the ion-source of ion-implantation tools. The PdM has been tested on a real production dataset.
Date of Conference: 17-20 August 2013
Date Added to IEEE Xplore: 07 November 2013
Electronic ISBN:978-1-4799-1515-6

ISSN Information:

Conference Location: Madison, WI, USA

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