The analysis of the features of automated production processes and cluster layout of technological complexes of nanoelectronic production is carried out; the approach to increase the productivity of automated cluster equipment in semiconductor production based on the control of semi-finished product flows is proposed. The simulation model is proposed for analyzing the processes of controlling the flow of semi-finished products and calculating the characteristics of nanoelectronic production, which enables search for rational solutions related to managing the flows of semi-finished products in multicluster technological complexes of any architecture, taking into account resource limitations and risk factors. The statement of the problems of planning the movement of semi-finished products in multicluster technological complexes, related to various strategies and performance criteria for the logistics of nanoelectronic production.