Abstract:
In this paper a new approach for measuring depth values of cavities of micro-electro mechanical system (MEMS) is presented. This measurement was done by using a simple op...Show MoreMetadata
Abstract:
In this paper a new approach for measuring depth values of cavities of micro-electro mechanical system (MEMS) is presented. This measurement was done by using a simple optical microscope and image processing techniques. The sample need not to be treated with any foreign material such as reflective or conductive coating.
Published in: 2009 12th International Symposium on Design and Diagnostics of Electronic Circuits & Systems
Date of Conference: 15-17 April 2009
Date Added to IEEE Xplore: 29 May 2009
ISBN Information:
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