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Finite element method design and analysis of a MEMS comb drive | IEEE Conference Publication | IEEE Xplore

Finite element method design and analysis of a MEMS comb drive


Abstract:

The purpose of this paper is to determine an optimum design for a DC-actuated, jagged-edge shaped comb drive incorporable in micro electromechanical systems (MEMS) as gri...Show More

Abstract:

The purpose of this paper is to determine an optimum design for a DC-actuated, jagged-edge shaped comb drive incorporable in micro electromechanical systems (MEMS) as gripper actuator for micro-robotics domain precise manipulation. The commercial Comsol Multiphysics software based on finite element method (FEM) was used to carry out all the simulations in the 2D domain. Several geometries were analyzed here, starting with the design having a minimum and maximum gap distances between fingers of 3 and 7 μm, wich complies with the Multi-User MEMS Process (MUMPs). Comb displacement with respect to actuation voltage and electrostatic force acting upon the movable comb teeth as a function of finger displacement were plotted and compared to all the designs.
Date of Conference: 25-27 June 2015
Date Added to IEEE Xplore: 26 October 2015
ISBN Information:
Conference Location: Bucharest, Romania

References

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