Abstract:
The International Technology Roadmap for Semiconductors (ITRS) is probably the single most important document governing the direction of the semiconductor manufacturing i...Show MoreMetadata
Abstract:
The International Technology Roadmap for Semiconductors (ITRS) is probably the single most important document governing the direction of the semiconductor manufacturing industry. The Factory Integration (FI) chapter seeks to define a roadmap for semiconductor factories and enterprise systems. This roadmap has gone through a significant revision over the past 2 years with a focus on commonality, integration, and data driven. New sub-chapters have been created for prediction, big data, and control systems architectures. Challenges and potential solutions have been identified for each of these sub-chapters, some of which are common across industries, and others of which are unique to the semiconductor manufacturing industry.
Date of Conference: 22-26 September 2014
Date Added to IEEE Xplore: 06 November 2014
ISBN Information: