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Development of ultrasensitive extended-gate Ion-sensitive-field-effect-transistor based on industrial UTBB FDSOI transistor | IEEE Conference Publication | IEEE Xplore

Development of ultrasensitive extended-gate Ion-sensitive-field-effect-transistor based on industrial UTBB FDSOI transistor


Abstract:

The proof of concept of a new extended-gate pH sensor, developed on an industrial ultrathin body and buried oxide (UTBB) fully-depleted silicon-on-insulator (FDSOI) trans...Show More

Abstract:

The proof of concept of a new extended-gate pH sensor, developed on an industrial ultrathin body and buried oxide (UTBB) fully-depleted silicon-on-insulator (FDSOI) transistor, is reported. The strong electrostatic coupling between the front gate and back gate of UTBB FDSOI devices provide a signal amplification opportunity for sensing applications. On the other hand, the biasing capability through a capacitive divider circuit of a floating gate ISFET offers an ample advantage for fabrication of stable and CMOS compatible solid state chemical sensors. In addition, the deep downscaling of the state-of-the-art devices enables it to be sensitive at single-charge-resolution. By integrating aluminum oxide (Al2O3) for the pH sensing purpose, we obtained an extended-gate mode ISFET having a sensitivity of 475 mV/pH, which is superior to state-of-the-art low-power ISFETs.
Date of Conference: 11-14 September 2017
Date Added to IEEE Xplore: 16 October 2017
ISBN Information:
Electronic ISSN: 2378-6558
Conference Location: Leuven, Belgium

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