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Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations | IEEE Conference Publication | IEEE Xplore

Experimental extraction of BEOL composite equivalent thermal conductivities for application in self-heating simulations


Abstract:

Self-heating effects can seriously accelerate FEOL and BEOL degradation mechanisms. Moreover, as FET dimensions are continiously decreasing, the thermal resistance toward...Show More

Abstract:

Self-heating effects can seriously accelerate FEOL and BEOL degradation mechanisms. Moreover, as FET dimensions are continiously decreasing, the thermal resistance towards the Si bulk is increasing. As a result, the thermal properties of the BEOL become increasingly important. We develop dedicated test-structures and assess the equivalent thermal properties of the BEOL composite, which consists of Cu metallization and low-k interlayer dielectric (ILD). We study the impact of via density and configurations typical for those used in VLSI circuit designs. We can find through 3DFEM simulations, that equivalent anisotropic thermal properties can be provided for this composite, which can serve as calibrated parameters for FET thermal simulations.
Date of Conference: 03-06 September 2018
Date Added to IEEE Xplore: 11 October 2018
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Conference Location: Dresden, Germany

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