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Integrated circuits' characterization for non-normal data in semiconductor quality analysis | IEEE Conference Publication | IEEE Xplore

Integrated circuits' characterization for non-normal data in semiconductor quality analysis


Abstract:

The standard metrics for integrated circuits' analysis and characterization in production processes usually assume that the process under investigation is characterized b...Show More

Abstract:

The standard metrics for integrated circuits' analysis and characterization in production processes usually assume that the process under investigation is characterized by a normal distribution. However, the data met in practice are not always normal and the yield estimates may be inaccurate. In this paper we propose estimating the yield by using a distribution fitting flow. The selected distribution types proved to estimate more accurate yields, with lower variance of the estimates. The distribution models proved to be a reliable tool also for integrated circuits' characterization in terms of specification limits' determination.
Date of Conference: 22-26 May 2017
Date Added to IEEE Xplore: 07 July 2017
ISBN Information:
Electronic ISSN: 1558-1780
Conference Location: Limassol, Cyprus

References

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