This paper describes work in progress on the development of a test strategy for deep submicron production test application, based on an optimal use of scan, functional and fast I/sub DDQ/ tests. In particular the I/sub DDQ/ part of the DSM production test flow is of interest. In order to compare different strategies as well as the influence of measurement tools, a large number of measurements were carried out on different devices and using different measurement solutions. The results show that in combination with the proper measurement strategy, there is a future for DSM production I/sub DDQ/ testing. Another important conclusion is that the quality of the I/sub DDQ/ measurement equipment is an important factor affecting the screening efficiency.