Abstract:
A new generation of instrumentation is developed to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up ...Show MoreMetadata
Abstract:
A new generation of instrumentation is developed to address the challenge of on-wafer measurement of nanodevices in the microwave regime. The system proposed is built up with a vector network analyzer, a scanning electron microscope and home-made miniaturized ground-signal-ground (GSG) probes fabricated on silicon-on-insulator (SOI) technology and mounted on nano-positionners. A first generation of probing structures with contact sizes of 1µm2 have been designed, fabricated and characterized up to 40 GHz.
Published in: 2015 IEEE International Instrumentation and Measurement Technology Conference (I2MTC) Proceedings
Date of Conference: 11-14 May 2015
Date Added to IEEE Xplore: 09 July 2015
Electronic ISBN:978-1-4799-6114-6
Print ISSN: 1091-5281
Contents 