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Design and technology co-optimization near single-digit nodes | IEEE Conference Publication | IEEE Xplore

Design and technology co-optimization near single-digit nodes


Abstract:

As we approach single-digit nodes, traditional design for manufacturability is augmented through several methodologies and design paradigms such as design-technology co-o...Show More

Abstract:

As we approach single-digit nodes, traditional design for manufacturability is augmented through several methodologies and design paradigms such as design-technology co-optimization (DTCO), systematic yield limiters optimization (SYLO), and design retargeting. We discuss triple-patterning and spacer-based multiple patterning and their design implications as these technologies will be necessary to cruise us to single-digit nodes. With the help of DTCO, there seems to be a clear path to sub-10nm with or without extreme ultra-violet lithography.
Date of Conference: 02-06 November 2014
Date Added to IEEE Xplore: 08 January 2015
Electronic ISBN:978-1-4799-6278-5

ISSN Information:

Conference Location: San Jose, CA, USA

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