The direct feed system is prone to generate vibration due to insufficient damping in the direction of movement. In order to suppress the vibration of direct drive feed system, this paper presents a novel hybrid-excitated eddy current damper functioned as the damping compensation mechanism, which has non-contact mechanical structure and approximate linear damping characteristics. In this work, the characteristics of damper are investigated by Finite Element Analysis (FEA). The motion controller of the system was designed as a cascaded feedback structure with feedforward compensation. The control parameters are adjusted based on the identification of motor dynamic by the unbiased least square (ULS). Finally, the eddy current damper is installed in the motion direction of the direct drive feed system, and the vibration suppression experiments are implemented with 4.5g maximum acceleration. The results show that the root mean square value (RMS) value is reduced by 66% with the proposed method.