Abstract:
In this work, we present the integration of functionalized tin dioxide gas sensors on CMOS fabricated microhotplate chips. Spray pyrolysis was used to deposit the gas sen...Show MoreMetadata
Abstract:
In this work, we present the integration of functionalized tin dioxide gas sensors on CMOS fabricated microhotplate chips. Spray pyrolysis was used to deposit the gas sensitive films, with a thickness of 50 nm, on CMOS microhotplates. The SnO2 thin films were functionalized with noble bimetallic nanoparticles - PdAu - by inkjet printing and the influence of the nanoparticles on the sensor performance was evaluated. The functionalization of the CMOS integrated SnO2 sensors with PdAu nanoparticles lead to an almost three times higher sensor response towards carbon monoxide compared to the bare SnO2 thin film. The CMOS microhotplate chips are also applicable for 3D-integration of different gas sensing systems based on through-silicon-via technology. Building devices for daily life applications is possible with such 3D-integrated nanosensors.
Published in: 2016 IEEE SENSORS
Date of Conference: 30 October 2016 - 03 November 2016
Date Added to IEEE Xplore: 09 January 2017
ISBN Information: