Abstract:
We measure the effect of radiation damage on an on-chip mid-infrared methane gas sensor made using a spiral chalcogenide glass waveguide. The sensor is fabricated using U...Show MoreMetadata
Abstract:
We measure the effect of radiation damage on an on-chip mid-infrared methane gas sensor made using a spiral chalcogenide glass waveguide. The sensor is fabricated using UV lithography and a lift-off process after deposition of chalcogenide glass using a thermal evaporator. We measure the transmittance change of the sensor at varying concentrations of methane after varying doses of irradiation.
Published in: 2016 IEEE SENSORS
Date of Conference: 30 October 2016 - 03 November 2016
Date Added to IEEE Xplore: 09 January 2017
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