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A force-balanced negative feedback method for MEMS based electrochemical seismic sensor | IEEE Conference Publication | IEEE Xplore

A force-balanced negative feedback method for MEMS based electrochemical seismic sensor


Abstract:

This paper presents a MEMS based electrochemical seismic sensor with force-balanced negative feedback where the bandwidth of the proposed device was extended from 7-20 Hz...Show More

Abstract:

This paper presents a MEMS based electrochemical seismic sensor with force-balanced negative feedback where the bandwidth of the proposed device was extended from 7-20 Hz to 0.1-50 Hz. The quantified sensitivity of 3227 V/ (m/s) was 161.4 times greater than the commercial moving-coil seismic sensor in the low frequency domain. The proposed seismic sensor may be widely used as a promising seismic detecting device in the field of seismology.
Published in: 2017 IEEE SENSORS
Date of Conference: 29 October 2017 - 01 November 2017
Date Added to IEEE Xplore: 25 December 2017
ISBN Information:
Conference Location: Glasgow, UK

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