Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system | IEEE Conference Publication | IEEE Xplore

Simulation based real-time scheduling method for dispatching and rework control of semiconductor manufacturing system


Abstract:

Implementing effective and efficient scheduling methods is a critical means to gain competitiveness for wafer fabrication manufacturers in today’s global semiconductor ma...Show More

Abstract:

Implementing effective and efficient scheduling methods is a critical means to gain competitiveness for wafer fabrication manufacturers in today’s global semiconductor market. Qualified scheduling approaches should make adaptive decisions based on real-time processing status. Most of real-time scheduling algorithms are open-loop ones, they do not continuously monitor the performance of the semiconductor manufacturing system (SMS) and select the optimal rule or strategy to improve performance. We develop a simulation based real-time scheduling (SBRS) mechanism in which dispatching rules and rework strategies vary dynamically based on real-time information. This paper also presents a real-time integrated scheduling (RIS) algorithm, which combines different dispatching rules and rework strategies. A case study is described to examine the performance impact of the scheduling method measured by cycle time, work in process, on-time delivery, and throughput. The results of the computational experiments show that the proposed scheduling method is superior to the use of static scheduling methods.
Date of Conference: 07-10 October 2007
Date Added to IEEE Xplore: 02 January 2008
ISBN Information:
Print ISSN: 1062-922X
Conference Location: Montreal, QC, Canada

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