Abstract:
In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock excitation of a movable electrode. the multidimensional basis of outp...Show MoreMetadata
Abstract:
In this paper the authors propose electrostatic multi-parameter measuring MEMS-transducer with shock excitation of a movable electrode. the multidimensional basis of output signals generated by a two-parameter measuring transducer under conditions of shock excitation of voltage-controlled movable MEMS-electrodes in electrostatic capacitor has been constructed. The peculiar features of a two-parameter sensor for measuring pressure and temperature are considered. Simulation of a two-parameter measuring transducer has been carried out and its calibration characteristics have been obtained.
Date of Conference: 21-23 October 2018
Date Added to IEEE Xplore: 30 December 2018
ISBN Information: