LCC high voltage generator is widely adopted for X-ray beam excitation and control. It has the requirement of wide load range, fast transients, high efficiency and reduced system size. Therefore, SiC based high voltage generator switching at 2X-3X of current frequency will be a better option. Accurate prediction of SiC switching characteristics as well as comprehensive switching behavior evaluation are important prerequisites for thermally optimized and efficient SiC system design. This paper proposed on a novel miller capacitor modeling approach: Segmented-and-Cascaded approach. The mismatch between modeled capacitor curve and measurements data from datasheet is within 15%, which is three times as less as the SPICE model. A comprehensive switching characterization is also revealed. The hard turn on loss is 157.7μ J at 500V/40A and will be significantly reduced under ZVS-ON. The turn off energy loss under hard switching is 48.1μ J at 500V/40A. It is reduced to 4.43μ J with 3.2nF snubber capacitor at soft turn off. Good consistency is observed of predicted data vs. measurements with maximum deviation of 17.2%. SiC power transistor with ZVS turn on and soft turn off has the lowest switching loss of 9.12μ J. Therefore, designing the LCC inverter at switching frequency higher than resonant frequency will achieve both high efficiency and high power density.