Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks | IEEE Conference Publication | IEEE Xplore

Trap-polarization interaction during low-field trap characterization on hafnia-based ferroelectric gatestacks


Abstract:

This paper investigates the characterization of charge trapping and its modelling on hafnia-based ferroelectric field effect transistors (FeFETs). Defect characterization...Show More

Abstract:

This paper investigates the characterization of charge trapping and its modelling on hafnia-based ferroelectric field effect transistors (FeFETs). Defect characterization on MOSFETs can be done by studying threshold voltage shifts (∆Vth) as a function of charging and relaxation times. At positive gate voltages one expects electron trapping in the gate oxide to result in a positive shift of the threshold voltage (Vth). However, on a FeFET those conditions will induce polarization changes in the gate oxide leading to a negative Vth-shift, complicating the characterization of defect levels. We aim to alleviate these difficulties by modelling the polarization and trapping in FeFETs over a wide range of timescales, suitable for defect characterization. We demonstrate quantitative agreement on long timescales with a static polarization model, while a time-dependent polarization model can be used for qualitative agreement over a wide range of times from 30 ms to 2 ks.
Date of Conference: 27-31 March 2022
Date Added to IEEE Xplore: 02 May 2022
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Conference Location: Dallas, TX, USA

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